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Hey Balram. Personally I feel it is better to use R software to conduct SEM analysis. R is a free package with plenty of ways to work. If not use SPSS to conduct structural equation modeling analysis.

Selection of tool mainly depends on your research objective. SmartPLS is very good tool. You can use it. If not you can use IBM SPSS AMOS for SEM analysis. Vineet, You can only use SPSS for an initial factor analysis.. It is a software program used to fit structural equation models (SEM).

I agree with Sneha, IBM SPSS Amos is powerful structural equation modeling software. It enables you to support your research and theories by extending standard multivariate analysis methods, including regression, factor analysis, correlation, and analysis of variance. Using SEM, you can quickly create models to test hypotheses and confirm relationships among observed and latent variables.